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Electron and Scanning Probe Microscopy

JEOL 2010F Transmission Electron Microscope (TEM)

Dr. Ji-Ping Zhou, Facility Manager
Texas Materials Institute
Mail Code C2201
Phone (512) 232-1884
Cell (512) 560-9813
FAX (512) 475-8482 

Field Emission Gun (FEG)
Ultra high-Resolution Observation System
Fast Operating for network (NT) and Imaging System
Scanning Image Devices to be operated as STEM from TEM
Electron Biprism for holography
Several atom level probes connected to Oxford INCA Energy Dispersive Spectrometer (EDS) and Gatan 2D Digital-Parallel Electron Energy Loss Spectrometer (DigiPEELS)
Specimen Preparation Facilities:
Fishione1010 Ion Miller
Fishione150 Dimpling Grinder
Fishione150 Plasma Cleaner
Fishione 150 Ultrasonic Disk Cutter

FEI Strata™ DB235 SEM/FIB

Mike Tiner
4.116 NST
1 University Station A5500
Austin, TX 78712
(512) 232-3695

The FEI Strata™ DB235 is a dual beam SEM/FIB system combing a scanning electron microscope (SEM) with thermal emission tip for high resolution imaging and a focused ion beam (FIB) with gallium metal ion beam source for nanoscale cutting. The system is capable of:


·High Resolution SEM image with resolution ~3 nm (only to be used in conjunction with milling or other applications)

·Nanoscale cutting of structures using focused ion beam while simultaneously monitoring the progress using SEM.

·gas injection system for metal deposition (electron or ion beam induced deposition)

·TEM sample preparation


Dr. Xiaoxia Gao, Facility Manager
Texas Materials Institute
MER 1.608J (Office)
MER 1.824 (Facility)
Mail Code R9900
Phone (512) 471-0233 (Office)
Phone (512) 471-1566 (Facility)
FAX (512) 475-8482

FEI TECNAI G2 F20 X-TWIN Transmission Electron Microscope (TEM) is an analytical system with excellent high-resolution imaging and atomic resolution microanalysis capabilities. The system is optimized for high spatial resolution analysis and has an EDS solid angle of 0.3 steradian.

Unique, optimized user interface
Excellent fine-probe performance
Applications software support
Advanced Electron Optics design
Rapid mode switching
Rapid acceleration voltage switching

LEO 1530 scanning electron microscope

Dr. Hugo Celio
Surface Analysis Facility Manager
Materials Texas Institute
University of Texas at Austin
2.110 NST
1 University Station A5500
Austin, TX 78712
Cell phone: (512) 705-2379

Main features include: GEMINI field emission column with a thermal field emitter; superb resolution and image quality at low operating voltage- 3nm at 1 KV; wide operating voltage range 200V to 30 KV; high probe current and stability for fast X-ray analysis; in-lens annular detector for bright, clear surface-specific image; EDS system for elemental analysis and mapping; all operations are computerized; fast multi-specimen loading system.

Digital Instruments Dimension 3100 with Nanoscope IV controller

Dr. Damon Smith
4.116 NST
1 University Station A5500
Austin, TX 78712
(512) 232-3694

The Dimension 3100 scanning probe microscope utilizes standard and advanced SPM imaging modes to measure surface characteristics for semiconductor wafers, lithography masks, magnetic media, CDs/DVDs, biomaterials, optics, and other samples up to 200mm in diameter. Precise laser tracking and the ability to change scanning techniques without tools guarantee flexibility and ease of use. The system's NanoScope 3D controller can scan from the maximum scan size to a few nanometers with full 16-bit resolution on all scan waveforms and on each axis. Available scanning techniques: Contact mode, Tapping mode, Non-contact mode, Phaseimaging, Lateral force microscopy, Magnetic force microscopy, Electric force microscopy, Surface potential microscopy, Tunneling atomic force microscopy, FastScan Imaging, Nanomanipulation (NANOMAN).



Asylum Research Molecular Force Probe 3D AFM

Tapping-mode AFM image of Si (111) following chemical removal of native oxide layer. Single atomic steps (0.3 nm) are clearly visible, the total z-height range of this image is 1.8 nm. Image courtesy of Adam Libson, Ed Narevicius, and Max Riedel.

Dr. Damon Smith
4.116 NST
1 University Station A5500
Austin, TX 78712
(512) 232-3694

The Molecular Force Probe 3D (MFP-3D) atomic force microscope records surface topography, friction, and chemical composition with nanoscale resolution. It can measure molecular forces of single molecules specially resolved with high sensitivity and accuracy.The MFP is mounted on an inverted optical microscope which allows simultaneous epi-fluorescence and surface probe measurements. Features of this SPM include:

Closed loop in X, Y and Z for precise positioning
NPS sensors for piezo hysteresis and creep correction
Low coherence light source to eliminate interference
100 x 100 mm scan range in x-y, and 16 mm in z
Igor Pro based software - easily adaptable to special needs
Olympus model IX70 inverted optical microscope




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